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Micromachining of CVD diamond by RIE for MEMS applications

Ding, G.F., Mao, H.P., Cai, Y.L., Zhang, Y.H., Yao, X., Zhao, X.L.
Journal:
Diamond and Related Materials
Year:
2005
Language:
english
File:
PDF, 259 KB
english, 2005
41

[ASME ASME 2016 Fluids Engineering Division Summer Meeting collocated with the ASME 2016 Heat Transfer Summer Conference and the ASME 2016 14th International Conference on Nanochannels, Microchannels, and Minichannels - Washington, DC, USA (Sunday 10 July 2016)] Volume 1B, Symposia: Fluid Mechanics (Fundamental Issues and Perspectives; Industrial and Environmental Applications); Multiphase Flow and Systems (Multiscale Methods; Noninvasive Measurements; Numerical Methods; Heat Transfer; Performance); Transport Phenomena (Clean Energy; Mixing; Manufacturing and Materials Processing); Turbulent Flows — Issues and Perspectives; Algorithms and Applications for High Performance CFD Computation; Fluid Power; Fluid Dynamics of Wind Energy; Marine

Wang, Yue, Cai, Weihua, Wei, Tong-zhou, Li, Feng-chen, Yao, Li-ming, Zhao, Meng-shi
Year:
2016
Language:
english
File:
PDF, 1.77 MB
english, 2016